KLA Tencor 710-029421-00 Controller Board

Product manual:

KLA Tencor 710-029421-00 Controller Board
It is one of the core control modules applied in KLA Tencor semiconductor detection and measurement equipment,
Mainly responsible for coordinating and executing the operational logic and control commands of various subsystems, such as motion platforms, image processing units, sensor interfaces, etc.
This controller board plays a key role in achieving automated detection processes, high-precision data acquisition, and system synchronization.

1、 Product Overview
Product model: 710-029421-00

Product type: Controller Board

Brand: KLA Tencor

Functional positioning: Device main control or subsystem control, responsible for logic processing, instruction distribution, status monitoring and other functions

2、 Core functions
Function module description
Motion control interface controls the execution components of X/Y/Z axis platforms, automatic alignment systems, or detection heads
I/O control function manages digital and analog inputs and outputs, connects sensors, drivers, alarms, etc
Real time data communication with the upper computer (main control system) or other boards (such as image board, power board)
Multi task processing capability supports simultaneous control of multiple subsystems, such as image acquisition units, scanning platforms, laser modules, etc
Real time feedback module operation status for system status management, providing fault diagnosis and interlock protection functions

3、 Typical application scenarios
Wafer inspection equipment
Control the synchronous movement of the wafer stage, alignment system, and detection optical path to achieve high-precision image acquisition and analysis.

Automatic Optical Inspection (AOI) System
Manage the initiation, scanning, image acquisition, data transmission, and judgment processes of the detection process.

Laser interference measurement system
Control the coordinated operation of laser and displacement sensor for precise measurement of film thickness, surface profile, etc.

Interface control of automation equipment
As a control platform, it integrates control with robot arms, fixtures, conveyor belts, and other equipment.

Product details picture:

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