Details
KLA Tencor 710-404228-00 Limit Breakthrough Board
Product manual:
KLA Tencor 710-404228-00 Restricted Breakthrough Board - Product Application Fields
Safety and protection functions in semiconductor wafer inspection equipment
Ensure that the equipment operates within the set safety parameter range to prevent damage caused by overload, overcurrent, or abnormal conditions.
Electrical limit control of key components of equipment
This board is used to manage and monitor the electrical parameters of key components of equipment,
Take timely protective measures when the preset limits are exceeded, such as voltage, current, temperature, etc.
Restriction Management in Motion Control Systems
In motion control modules such as wafer handling and positioning platforms,
Monitoring of key thresholds in the process flow
Used to detect whether process parameters exceed safety thresholds,
Ensure the stability and accuracy of the testing process, and prevent abnormal working conditions from affecting product quality.
Abnormal event alarm and feedback
When the device parameters exceed the limit, the limit breaking board can trigger an alarm signal in a timely manner,
Assist the system in rapid response and processing, reducing equipment failures and downtime.
Adaptation support for multiple detection platforms
Widely used in various wafer inspection and process control equipment of KLA Tencor,
Compatible with different models and system architectures to ensure safe operation of equipment.
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