KLA Tencor 710-450320-00 Controller

Brand:KLA-Tencor
Model:710-450320-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

KLA Tencor 710-450320-00 Controller

Product manual:

The KLA Tencor 710-450320-00 controller is a key control module integrated into the KLA Tencor precision inspection equipment,
Mainly used to coordinate the operation of multiple subsystems in equipment, such as motion control, signal synchronization, data communication, and sensor driving.
This controller is widely used in KLA's optical inspection, defect analysis, and measurement systems, and is part of the 710 series product architecture.

1、 Basic Product Information
Product model: 710-450320-00

Product type: Controller Module

Brand manufacturer: KLA Tencor

Series: 710 Series Control Architecture

Functional positioning: Central control module (responsible for motion control, data synchronization, system management)

2、 Typical application areas
1. Wafer surface defect detection system
Control the coordinated actions of the optical scanning platform and image acquisition components.

Manage processes such as lighting control, camera triggering, and synchronous scanning.

2. Automatic Optical Inspection (AOI) equipment
Triggering and sampling control for high-speed image acquisition systems.

Control platform movement and camera system focusing and other actions.

3. Measurement system and morphology analysis equipment
Realize sub micron or nanometer level motion accuracy control, support Z-axis movement, tilt compensation, etc.

Control laser interferometer modules, linear platforms, or rotating axis equipment.

4. Internal mechanical subsystem control
Control automation components such as wafer handling robotic arms, alignment systems, and transfer units.

Implement automatic switching, reset, position detection and other operations in the process of manufacturing.