Details
KLA Tencor 710-603180-003 Interface Board
Product manual:
KLA Tencor 710-603180-003 Interface Board
(Digital Deflection Generator Interface Board)
Product Introduction
KLA Tencor 710-603180-003 is a digital deflection generator interface board used in electron beam (e-beam) detection equipment.
This board is one of the key components in the system, mainly used to provide accurate electrical signals for the deflection control system of the electron beam,
In order to achieve high-resolution image acquisition and surface defect detection.
major function
Control the precise movement of the electron beam on the wafer surface
Direct communication with the Digital Reflection Generator system for electron beam control
Support high-frequency and high-precision signal output to ensure detection accuracy
Optimizing the overall detection quality of collaborative image processing system
application area
Wafer defect detection equipment
Quality Control System for Semiconductor Production Line
Precision scanning imaging system
Process evaluation and debugging platform for R&D laboratory
Technical Information (Overview)
Model/Part Number: 710-603180-003
Type: Interface Board Assembly
Manufacturer: KLA Tencor
Common equipment: Electron beam detection equipment applied to KLA, such as eS series or e-beam related systems
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