KLA Tencor 710-609995-002 Controller

Product manual:

KLA Tencor 710-609995-002 Controller - Product Application Fields
This controller is a key module in KLA Tencor's high-end semiconductor detection and measurement equipment,
Usually responsible for system level control, motion coordination, motor drive, or equipment functional logic management.

1. System control unit for wafer inspection and measurement equipment
Applied to KLA systems such as Surfscan, P-Series, SP series, eBeam, etc;

As the main control unit, coordinate multiple sub modules within the device
Collaborative work of image acquisition, focusing, handling, laser scanning, etc;

Execute real-time operating system (RTOS) or embedded logic control tasks,
Ensure detection accuracy and response speed.

2. Motor and servo control of multi axis motion platform
Control the movement of X/Y/Z or R axis platforms, supporting sub micron positioning;

Integrate or match stepper motors, linear motors, or servo systems to perform operations such as autofocus and wafer handling;

Support closed-loop feedback systems (such as encoders) to improve motion accuracy and reliability.

3. Synchronization and control of optical and imaging modules
Manage signal coordination between laser emitters, image capture devices (CCD/CMOS), and processors;

Adjust scanning frequency, exposure time, and optical path alignment to optimize defect recognition image quality.

4. System communication and equipment coordination core

Implement data exchange and state synchronization between submodules;

As an intermediate control layer that bridges the main control board and various execution units in complex systems.

Applicable industries and system scenarios
Application direction scenario description
Key modules such as optical scanning, image acquisition, and wafer positioning system for wafer inspection control
Measurement equipment drives multi axis platforms, focusing devices, and high-precision detectors
Automated manufacturing serves as the core of equipment control logic processing, scheduling and coordinating various functional modules
Laser and optical measurement system control laser path adjustment, focusing system, scanning head and image sensor work synchronously

Product features (speculated, based on functionality)

Product details picture:

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