KLA Tencor 710-609995-003 Reflective Generator Module

Product manual:

KLA Tencor 710-609995-003 Reflective Generator Module

product overview
KLA Tencor 710-609995-003 is a reflective generator module used in semiconductor detection systems,
It is usually integrated into wafer inspection equipment, thin film measuring instruments, or other systems involving reflectance spectroscopy analysis,
It is one of the key electronic modules for achieving sub micron level measurement accuracy.

Core functions and roles

Auxiliary optical path calibration

Provide reference signals in complex optical path structures,
So that the system can automatically correct the light source offset or detect drift.

Cooperate with the interferometric measurement module for operation

Support thin film interferometry measurement and multi-layer film thickness detection,
Improve the accuracy and repeatability of optical analysis systems.

Precision Drive and Control

Implementing high-frequency and low-noise output control through integrated circuits,
It can accurately adjust the intensity and frequency of the light source.

Typical application areas
Application Direction Description
Wafer surface inspection is used to generate standardized reflection signals, identify surface defects, scratches, particles, etc
Optical measurement system combined with reflectivity measurement tool to calibrate system response and improve accuracy
Layer thickness analysis in multilayer film systems involves inferring the thickness of the film layer through reflection data
Real time feedback of wafer process status for semiconductor process monitoring, used in process control closed-loop systems
The optical alignment system provides reference signals to assist the alignment system in automatically correcting focus and position

Technical parameters (reference)
Working voltage:+12V/+24V (depending on equipment configuration)

Output control frequency: adjustable (tens of kHz to MHz level)

Modulation mode: PWM or linear modulation

Output interface: mixed analog/digital signals, or communication through backplane

Temperature range: 0 ° C~50 ° C Industrial standard

Compatible systems: KLA Surfscan, PUMA, SPxx series and other wafer inspection equipment

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