KLA Tencor 710-610801-001 Single Axis Controller

Brand:KLA-Tencor
Model:710-610801-001
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

KLA Tencor 710-610801-001 Single Axis Controller

Product manual:

product overview
The KLA Tencor 710-610801-001 single axis controller is a high-performance control unit specifically designed for controlling a single servo axis (such as a platform, probe, lens module, etc.) in semiconductor equipment.
It is used to achieve precise one-dimensional motion control and is one of the indispensable subsystems in wafer inspection and measurement equipment.

major function
Single axis drive and control
Control the starting, speed, acceleration and deceleration curves, and precise position of servo motors or stepper motors,
Ensure that the motion platform or executing components achieve the set goals.

High precision feedback processing
Support encoder feedback input, achieve closed-loop control, and improve positioning accuracy and stability.

Motion contour generation
Generate smooth motion paths (such as trapezoidal or S-shaped velocity curves) based on input commands,
Suitable for high-precision and low vibration motion requirements.

Interface and communication support
Compatible with standard industrial communication interfaces such as RS-232, RS-485, CAN, PCI, etc,
Support data exchange and remote configuration with the main control system.

Technical Characteristics
Real time control core: built-in embedded processor,
Capable of high-speed control loop and low latency response.

Integrate multiple protection mechanisms, including overcurrent protection, overvoltage protection
Limit switch processing and fault self diagnosis.

Microstep control capability: Supports microstep modulation and resolution adjustment to improve low-speed stability.

Modular design: convenient for replacement, maintenance, and integration, suitable for various automation control environments.

Typical application areas
Wafer inspection system: controls the single dimensional movement of optical modules or detection platforms,
Such as focus adjustment and sample scanning.

Measurement equipment: used for positioning detection heads or wafer trays to achieve precise measurement paths.

Automatic Optical Inspection (AOI) system: drives the lens group to move to complete image scanning.

Precision platform control: such as micro scale movement control for laser focusing modules, particle detection platforms, etc.