Details
KLA Tencor 710-611487-001 Single Axis Controller
Product manual:
KLA Tencor 710-611487-001 Single Axis Controller
product overview
KLA Tencor 710-611487-001
It is a single axis controller module specifically designed for semiconductor testing equipment, commonly used in its electron beam scanning system (such as the eS20 series).
This module is mainly responsible for providing stable DC power to the image computing unit and related control circuits,
Ensure the stability and accuracy of equipment operation.
major function
Power conversion and stable output
Convert AC power to stable DC voltage to ensure the normal operation of image processing and motion control units.
Signal scheduling and management
Responsible for controlling the reception, transmission, and coordination of signals to ensure synchronous operation of all parts of the system.
system integration
Closely cooperate with other control modules and sensors to achieve efficient control of semiconductor detection equipment.
application area
Wafer defect detection in semiconductor manufacturing
High precision testing equipment for process research and quality control
technical specifications
Part number: 710-611487-001
Manufacturer: KLA Tencor
Version: The common version is Rev. A
Applicable equipment: Electron beam wafer inspection system, such as eS20 series
Product details picture:

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