KLA Tencor 710-611529-000 Control Board

Product manual:

The KLA Tencor 710-611529-000 control board is a critical control circuit board used in KLA Tencor's high-end wafer inspection or measurement equipment,
Mainly used for performing tasks such as motion control, signal processing, equipment coordination, and system communication.
It belongs to the 710 series module architecture and is usually integrated into core subsystems, used in conjunction with modules such as actuators, sensors, interface boards, etc.

1、 Basic Product Information
Product model: 710-611529-000

Product type: Control Board

Brand/Manufacturer: KLA Tencor

Application platform: 710 series optical detection/defect analysis system, etc

2、 Main application areas
1. Wafer Surface Inspection System
Control the linear or rotational motion of the scanning platform to achieve full surface coverage scanning of the wafer.

Collaborate with the image processing unit to ensure sampling synchronization and motion trajectory accuracy.

2. Automated Measurement Platform (Metrology Tools)
Used to control Z-axis or tilt platform motion, supporting nanometer level precision control.

Adjust mechanical actions such as focal length, sample height, and optical alignment system.

3. Optical imaging and defect analysis system
Manage lighting control, CCD/CMOS camera synchronization, and electric control of lens groups.

Provide timing signals and control logic to ensure image acquisition quality.

4. Internal subsystem control of KLA equipment
Manage motor drive, sensor status reading, and I/O signal distribution.

Implement communication and coordinated control with interface boards, IO boards, and servo controllers.

Product details picture:

710-611529-000

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