Details
KLA Tencor 710-611534-000 Control Board
Product manual:
The KLA Tencor 710-611534-000 control board is the core control module in the KLA Tencor semiconductor testing equipment,
Responsible for coordinating and managing the operation of multiple subsystems within the equipment, including motion control, signal processing, data communication, and other functions,
It is one of the key hardware components for achieving equipment automation and high-precision detection.
1、 Basic Product Information
Model: 710-611534-000
Type: Controller Board
Series: KLA Tencor 710 Series
Main functions: Perform device motion control, signal management, system coordination, and data communication
2、 Main functions and features
Function Description
Motion control supports single axis or multi axis motion control to ensure wafer positioning and scanning accuracy
Signal processing manages sensor signal input and actuator signal output to achieve closed-loop control
The communication interface provides multiple communication protocol interfaces, such as RS-485, CAN, Ethernet, which facilitate communication with the upper computer and other modules
System coordination and integration of multiple subsystems for control, unified management of equipment operation status and processes
Fault detection and protection support real-time monitoring, alarm and safety protection, ensuring stable operation of equipment
Modular design facilitates equipment maintenance, upgrading, and expansion
3、 Typical application areas
Wafer surface defect detection system
Automatic Optical Inspection (AOI) equipment
Optical measurement and scanning platform control
Automated system for wafer loading and handling
4、 Technical advantages
High performance processing capability to meet complex control requirements
Flexible communication capability, supporting multiple industrial protocols
Industrial grade design, suitable for harsh environments
Strong compatibility and easy integration into various KLA Tencor detection devices
Product details picture:

710-611534-000
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