Details
KLA Tencor 710-613108-001 Interface Board
Product manual:
Product model: KLA Tencor 710-613108-001
Main purpose: As a bridge component for signal input/output, it is used to connect the main control system with peripheral devices, and plays a role in communication and data conversion in KLA Tencor's detection, measurement, imaging and other equipment.
1、 Typical application areas
Wafer Inspection Systems
Connect the scanning platform, sensors, motor drivers, and image acquisition system.
Provide multi-channel digital and analog signal interfaces to achieve high-speed data exchange.
Metrology Tools
Used in systems such as thickness measurement, stress measurement, edge contour detection, etc., it works in conjunction with interferometers, optical sensors, and electronic control platforms.
Ensure precise transmission and synchronous acquisition of signals.
Electron Beam and Optical Imaging System
Support imaging platform control and data feedback for e-beam and optical detection systems.
The interface board can be used for key processes such as triggering signals, synchronizing image frames, and processing status feedback.
Automation control subsystem
Connected to subsystems such as wafer transfer robotic arm, automatic alignment platform, and pneumatic controller.
Compatible with multiple control protocols to meet device expansion requirements.
2、 Product Features (Overview)
Provide standard and customized electrical interfaces;
High electrical isolation to enhance system stability;
Modular design, easy to replace and upgrade;
Highly compatible with the KLA 710 series main control board and control module.
Product details picture:

710-613108-001
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