Details
KLA Tencor 710-650074-20 Controller
Product manual:
KLA Tencor 710-650074-20 Controller - Product Application Fields
Product type: ZPLL controller board (Zero Phase Locked Loop)
Mainly used in: KLA Tencor 2132, 2133 wafer defect detection system
1. Defect detection of semiconductor wafers
Used for high-speed scanning detection of surface defects on wafers,
Especially after inspection at key process nodes such as photolithography, etching, polishing, and deposition.
Support detection tasks for 200mm and 300mm wafers.
2. Image acquisition and synchronization control
As the phase locking control core of the system,
Coordinate the timing synchronization between the image acquisition module and the signal processing module.
Ensure the image stability and data accuracy of the device during high-precision sampling.
3. Clock management of high-speed detection system
Generate low-noise, high-precision synchronous clock signals.
Provide a unified timing basis for multiple key components within the system, such as sensors, motor controllers, etc.
4. Quality control and process monitoring
Suitable for quality control of 90nm, 65nm and more advanced process nodes.
Widely used for process stability analysis and yield improvement in manufacturing processes such as logic chips, DRAM, NAND, etc.
Typical usage scenarios:
Semiconductor manufacturing plants (such as TSMC, Intel, Samsung, Micron)
Process control equipment for wafer foundry and packaging testing plants
Process R&D center or testing laboratory
Product details picture:

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