KLA Tencor 710-650204-20 driver board
Brand:KLA-Tencor
Model:710-650204-20
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
KLA Tencor 710-650204-20 driver board
Product manual:
KLA Tencor 710-650204-20 driver board
It is a key module for precision motion control systems, mainly integrated into KLA Tencor's 2132 wafer defect detection equipment.
This device is widely used in the field of semiconductor manufacturing to identify small defects on the surface and between layers of wafers.
Product application areas
Wafer Defect Inspection System
The driver board is responsible for controlling the Y-axis linear moving component, achieving precise positioning and smooth movement of the wafer on the inspection platform.
This function is crucial for ensuring the accuracy of scanning imaging and defect recognition.
Image acquisition and scanning platform control
This module works in conjunction with the image acquisition system by driving a precision motor to move the wafer,
Realizing multi angle acquisition of high-resolution images is the fundamental step in image formation and analysis in the system.
Integration of automated detection system
In a complex automated inspection assembly line, the drive board serves as the core drive control unit of the subsystem,
Collaborate with other control boards (such as focus board, Z-axis control board) to complete system level synchronization operations.
High precision positioning control system
The driver board is equipped with a high-speed data processing unit and a precision feedback control mechanism,
Used to process real-time signals from displacement sensors or encoders, supporting micrometer level positioning control.
Production equipment maintenance and replacement of components
Modular design facilitates equipment maintenance and replacement, helping to improve the maintainability of the entire system,
Reduce downtime and improve production efficiency.
FEATURES
Model: 710-650204-20
Type: Y-axis Flex Drive Control Board
Function: High precision motor drive, motion path control, system status feedback
Application equipment: KLA Tencor 2132 series 200mm wafer inspection machine
Interface: Typically integrated with standard servo drive communication protocols, supporting high-speed data link communication with the main control system
Product details picture:
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