Details
KLA Tencor 710-651836-20 preamplifier module
Product manual:
KLA Tencor 710-651836-20 Preamplifier Module
It is a high-sensitivity signal amplification unit designed specifically for KLA Tencor's optical detection and measurement system
To be used for primary amplification and conditioning of weak analog signals, so that subsequent processing modules can accurately collect and analyze data.
It plays a crucial role in semiconductor wafer defect detection, imaging systems, or laser measurement systems.
1、 Product Overview
Product model: 710-651836-20
Type: Preamplifier Module
Manufacturer: KLA Tencor
Function positioning: Used for high gain and low noise amplification of low-level analog signals
Adaptation platform: KLA Tencor 710 series detection and measurement equipment
2、 Core functions
Function module description
Low noise amplification performs primary amplification on weak signals from photodetectors, sensors, or probes to improve signal-to-noise ratio (SNR)
High frequency response supports the demand for high-speed sampling equipment, suitable for dynamic measurement and high-speed imaging systems
Electromagnetic shielding and stability have good EMI shielding design, ensuring stable and reliable operation in complex industrial environments
3、 Application Fields
1. Wafer surface defect detection system
Connect CCD, CMOS, APD (avalanche photodiode) and other detectors for front-end processing of weak photoelectric signals.
Enhance image contrast and improve defect resolution during the scanning process.
2. Optical measurement system
Receive interferometers, laser reflection signals, and perform pre amplification to measure physical parameters such as wafer surface morphology and film thickness.
Can be combined with Z-axis feedback system to achieve dynamic focusing and tracking.
3. e-beam electron beam imaging system
Amplify secondary electronic signals or current signals with high bandwidth to achieve clear image acquisition.
This is particularly important under low-dose imaging conditions, as it helps maintain high sensitivity.
4. Automatic alignment system
Amplify weak alignment signals (such as laser alignment or stripe interference signals) and output them to the controller to improve system alignment accuracy.
Product details picture:

710-651836-20
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