Details
KLA Tencor 710-652697-00 Sensor Module
Product manual:
KLA Tencor 710-652697-00 Sensor Module
It is an important electronic unit in KLA Tencor semiconductor detection equipment, mainly used for collecting and processing signals from various sensors,
Provide accurate data support for the automatic control and detection functions of the equipment.
1、 Basic Product Information
Model: 710-652697-00
Type: Sensor Module
Series: KLA Tencor 710 Series
Functional positioning: Collecting, amplifying, conditioning, and transmitting sensor signals as an important input unit for control systems
2、 Main functions
signal acquisition
Receive analog or digital signals from various sensors such as optical sensors, laser sensors, position encoders, etc.
Amplify, filter, and condition the signal to ensure signal quality.
Signal Conversion
Convert the collected signals into standard format and adapt them to subsequent control and processing units.
Support multi-channel input and achieve multi-point data collection.
data transmission
Transmit signals to the main control board or data processing module through standard interfaces.
Support real-time data updates to meet high-speed detection requirements.
Status monitoring and protection
Monitor the working status of the monitoring module and sensors to prevent abnormal signals from affecting equipment operation.
Built in electrical protection mechanism to prevent damage caused by overcurrent and overvoltage.
3、 Application Fields
Wafer Inspection and Measurement System
Connect various sensors to ensure the accuracy and stability of detection data.
Automated Control Platform
Collect information on mechanical motion, environmental parameters, etc. to assist in equipment operation control.
Image acquisition and processing system
Support optical sensor signal input to achieve high-precision defect detection.
Product details picture:

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