Details
KLA Tencor 710-658051-20 processor board
Product manual:
KLA Tencor 710-658051-20 Processor Board
Mainly used in KLA Tencor's high-end wafer inspection and metrology equipment,
Especially in systems that perform high-speed and high-precision defect detection on wafer surfaces during semiconductor manufacturing processes.
1、 Product Function Overview:
This processor board is typically one of the computing core modules of the system, responsible for:
Image data acquisition and high-speed processing
The operation of defect analysis and image recognition algorithms
Collaborative communication with storage, image processing, control units, etc
Real time control and feedback logic processing
2、 Application areas:
Semiconductor Manufacturing Inspection
Applied to the middle and later stages of wafer manufacturing processes,
Such as post lithography inspection, post cleaning inspection, and post etching surface inspection.
Wafer defect detection system
Such as AIT, e-beam, Brightfield, Darkfield and other series of detection equipment,
Used to capture micrometer level defects on the surface of wafers.
Measurement and quality control equipment
Used as a high-speed decision analysis unit in the production line,
Implement automatic defect classification (ADC) and production line feedback control.
Data intensive image analysis system
Support real-time computation of large data images to meet the processing requirements of multi-channel parallel analysis.
3、 Typical supporting system:
KLA Tencor AIT2/eS/21xx series equipment
Wafer level defect detection platform
Optical or electron beam image processing platform
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