KLA Tencor 710-658076-20 Fault Processor Module

Brand:KLA-Tencor
Model:710-658076-20
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

KLA Tencor 710-658076-20 Fault Processor Module

Product manual:

The KLA Tencor 710-658076-20 Fault Processor Module is a diagnostic and system protection module used in semiconductor testing equipment.
Its core function is to monitor the system status in real-time and handle various potential faults during device operation, thereby improving device stability and operational efficiency.

Main application areas:
Wafer defect detection system
Applied in wafer inspection equipment such as Surfscan, SP, and P series,
Provide fault warning and protection for key components such as optical scanning heads, motion platforms, and image processors.
The module can monitor the hardware status in real time to prevent sudden failures from causing damage to the system.

Electron beam measurement and imaging equipment
Used in eBeam or HRP series for monitoring high-voltage systems
The operating status of electromagnetic scanning modules or imaging detectors ensures stable system operation and abnormal response.

System level diagnosis and remote maintenance
The module supports KLA's remote service interface and can send operation logs and diagnostic results to remote technical support teams,
Used for preventive maintenance, firmware upgrades, or remote fault location.

High availability control in production line equipment
Suitable for semiconductor production line equipment that requires uninterrupted operation 24/7,
By using this module, redundant control, hot backup, and online fault switching can be achieved to improve the reliability of production equipment.

Typical functional features:
Real time monitoring of equipment operation status (temperature, current, voltage, communication)

Fault detection and recording error codes

Automatic triggering protection mechanism (such as power outage, restart, isolation)

Support remote diagnosis, log collection, and maintenance command execution

Can be integrated into the main control system or subsystem of KLA detection equipment