KLA Tencor 710-658172-00 Controller Board

Brand:KLA-Tencor
Model:710-658172-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

KLA Tencor 710-658172-00 Controller Board

Product manual:

1、 Product identification
Model: 710-658172-00 (sometimes with REV H0 revision mark)

Function description: Y-Interpolator control board, used to control and interpolate precision movements related to the Y-axis

System application: commonly used in the main control card rack of wafer/mask inspection systems such as KLA Tencor 2132

2、 Function and Features
Y-axis interpolation control

Specially designed to handle precise interpolation operations on the Y-axis,
Ensure that the scanning system can perform high-precision stepping and positioning in the Y direction

Installation environment

Inserted into the main control card slot of the system,
Collaborate with X-Interpolator, main processing board, and image processing board

Collaborative control system

Maintain synchronization with optical/electron beam scanning heads, platform drivers, and feedback sensors,
Ensure consistency and accuracy in the movement of the entire detection system

3、 Common application areas
Wafer/Mask Inspection System

Specially designed for KLA Tencor 2132 series equipment, common control card combinations in this system include:

X-Interpolator Control Board (710-658176-00 REV A0)

Y-Interpolator control board (710-658172-00 REV H0)

The main control board and auxiliary board work together to form a complete motion control system

High precision scanning platform

Can be applied to other scanning and detection devices that require precise Y-axis control,
Motion control subsystems for platforms such as Surfscan and Acrotec