Details
KLA Tencor 710-658177-20 processor module
Product manual:
KLA Tencor 710-658177-20 processor module
KLA Tencor 710-658177-20 is a processor control module used in wafer inspection systems,
Commonly found in surface defect detection equipment such as KLA Tencor's 2132/2135 series,
It is mainly used to control the movement and synchronization of the X-axis in the scanning system, and is one of the core components in the entire image acquisition and processing process.
Main functions:
Control the precise movement of the wafer platform in the X-axis direction;
Responsible for real-time position interpolation calculation and achieving sub micron level motion control;
Collaborate with the image acquisition system to ensure synchronous and stable detection process;
Execute core processing tasks related to motion control, position feedback, scanning timing, etc.
Application areas:
Wafer defect detection in semiconductor manufacturing;
Position control of optical and electron beam imaging systems;
The core control unit of high-precision scanning and detection platform;
The key motion control module in the KLA Tencor surface inspection system.
Product information:
Model: 710-658177-20
Type: X-Interpolator Phase 3 processor module
Installation location: located in the internal control area of the detection device host
Adaptation system: such as KLA Tencor 2132 series 200mm defect detection platform
Working mode: Coordinated operation with the main controller, encoder interface, and motion drive circuit
Product details picture:

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