Details
KLA Tencor 710-658232-00 Controller Board
Product manual:
KLA Tencor 710-658232-00 Controller Board - Product Application Fields
Core control of wafer inspection and analysis equipment
This controller board is used in KLA Tencor's wafer inspection system as the core control unit,
Responsible for coordinating the operation of various functional modules of the equipment, processing the collected signal data,
Ensure the accuracy and efficiency of detection.
Image Processing and Signal Management
The controller board integrates image processing functions and supports the acquisition and analysis of high-resolution images,
Used for defect detection, particle analysis, and surface quality assessment.
Sports and equipment status control
Responsible for controlling and providing feedback on precision moving components within the equipment,
Including wafer positioning, scanning platform movement, focus adjustment, etc., to ensure high precision and stability in the detection process.
Communication and System Integration
Provide multiple communication interfaces to achieve high-speed data exchange with the upper computer, sensors, and other modules,
Support remote monitoring and automated control of devices.
Multi platform compatibility
Widely used in multiple KLA Tencor detection devices, such as the Surfscan series
The SP series and other advanced wafer inspection systems support different process nodes and wafer sizes.
Process optimization and quality control
Assist in process optimization during manufacturing through real-time data processing and feedback control,
Improve wafer yield and equipment operational efficiency.
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