Details
KLA Tencor 710-659465-20 Single Axis Controller
Product manual:
KLA Tencor 710-659465-20 Single Axis Controller Detailed Introduction
product overview
KLA Tencor 710-659465-20 is an industrial grade single axis motion control module specifically designed for semiconductor wafer inspection equipment.
With its stability and accuracy, it plays a crucial role in ensuring the efficient and reliable operation of equipment in the semiconductor manufacturing process.
Main functional features
High precision single axis motion control
Capable of accurately controlling the motion trajectory and speed of a single mechanical axis, supporting subtle position adjustments,
Meet the strict requirements of semiconductor testing equipment for positioning accuracy.
Real time high-speed data processing
Equipped with high-performance processors that can receive and process sensor data in real-time,
Timely feedback on motion status to achieve fast closed-loop control.
Integrate multiple interfaces
Supports multiple industrial standard communication protocols, making it easy to communicate with the main control system
Seamless integration of sensors and other peripheral devices.
Reliable hardware design
Adopting industrial grade components and protective design to ensure long-term stable operation of equipment in complex manufacturing environments.
Technical parameters (typical)
Part number: 710-659465-20
Number of control axes: single axis
Communication interface: Multiple industrial standard interfaces (specific models may vary depending on the version)
Work environment: Suitable for cleanroom environments, able to withstand a certain degree of vibration and temperature changes
Power requirements: Standard industrial voltage supply (specific parameters depend on actual equipment)
application area
Semiconductor wafer inspection
Accurately control the scanning and focusing system in the detection instrument to achieve high-resolution defect detection.
Precision positioning system
Used for robotic arms or mobile platforms in semiconductor equipment to achieve high-precision positioning and motion control.
Quality Control and Process Research and Development
In the development of semiconductor production processes and quality inspection, precise adjustment and repeatability control of equipment actions are achieved.
Product details picture:

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