KLA Tencor 710-659603-20 Single Axis Controller

Brand:KLA-Tencor
Model:710-659603-20
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

KLA Tencor 710-659603-20 Single Axis Controller

Product manual:

KLA Tencor 710-659603-20 Single Axis Controller
It is a key electronic module used in semiconductor testing equipment,
Mainly used in KLA Tencor's eS series electron beam (E-beam) wafer defect detection system.

product type
Part number: 710-659603-20

Name: Single Axis Controller

Manufacturer: KLA Tencor

Product application areas
1. Electron beam wafer defect detection system
This single axis controller is integrated into the KLA Tencor eS series electron beam wafer defect detection equipment,
Responsible for controlling the movement of a single axis in the equipment, such as positioning and adjusting the scanning head, to ensure precise scanning of the electron beam on the wafer surface.

2. Motion control system
As a part of the motion control system, the controller receives instructions from the main control system,
Drive motors or actuators to achieve precise axial motion, meeting the requirements of high-resolution defect detection.

3. Stable operation in high-precision detection environment
In high-precision electron beam detection environments, a single axis controller needs to have high response speed and stability,
To ensure positional accuracy and repeatability during the scanning process, supporting sub micron level defect detection.

Technical specifications and compatibility
Part number: 710-659603-20

Applicable equipment: KLA Tencor eS series electron beam wafer defect detection system

Function description: Control the movement of a single axis in the device to achieve precise scanning and positioning