KLA Tencor 710-663106-001 Single Axis Controller

Product manual:

The KLA Tencor 710-663106-001 single axis controller is mainly used in high-precision motion control scenarios,
Especially in semiconductor manufacturing and testing equipment. The following are the main application areas of its products:

1. Semiconductor wafer inspection equipment
Used for KLA Tencor 21XX series (such as 2132, 2135, 2138, 2139, etc.)
Control the scanning platform or optical probe in the middle to achieve high-precision single axis movement.

2. Automatic Optical Inspection Equipment (AOI)
Controlling single axis moving components (such as sample platform, microscope lens) in an image acquisition system,
Ensure the stability and positional accuracy of the motion during the detection process.

3. Precision motion control system
Can be used in scenarios that require single axis high-precision control,
Such as laser alignment systems, micrometer level focusing systems, etc.

4. Research and Material Analysis Platform
In experimental systems such as material analysis and surface defect research,
Used to drive mobile platforms to achieve single axis sample scanning.

Description of functional characteristics

Control one or two stepper motors

Support constant speed operation and acceleration/deceleration control

Communicate with the main control system through customized bus or ISA interface

Can achieve closed-loop position feedback control

Product details picture:

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