Details
KLA Tencor 710-663509-000 Control Board
Product manual:
KLA Tencor 710-663509-000 Control Board Detailed Introduction
1. Product Overview
KLA Tencor 710-663509-000 is a control board specifically designed for semiconductor testing equipment,
Especially playing a crucial role in wafer defect detection systems such as KLA Instruments 2132.
2. Function and Function
Auto focus control: This control board is equipped with high-precision control circuits,
The ability to adjust the focus position of the detection equipment in real time ensures clear images and accurate defect recognition during the detection process.
Signal processing: capable of processing feedback signals from sensors or scanning modules,
Adjust the action of the focus driver.
Interface support: Provide communication interface with the main control system to ensure the coordinated operation of the overall equipment.
Stability and reliability: The design meets industrial standards, adapts to the stable operation requirements of the testing environment, and reduces the failure rate.
3. Technical parameters (general situation)
Input voltage: usually meets the standard voltage of the equipment (please refer to the equipment manual for details)
Size and Installation: Complies with the mechanical installation specifications of KLA 2132 equipment for easy replacement and maintenance
Working temperature: Industrial grade working environment support, ensuring normal operation within a certain temperature range
Control accuracy: Micron level focus adjustment, improving detection sensitivity and accuracy
4. Scope of application
Mainly used for wafer defect detection in semiconductor manufacturing processes
Can be used for optical detection equipment that requires high-precision focusing
Support automatic defect detection system for KLA 2132 and similar models
5. Maintenance and Precautions
Ensure stable power supply during use to avoid voltage fluctuations affecting performance
Regularly check the connection interface to prevent looseness or oxidation
Avoid strong vibrations and humid environments to extend service life
Replacement should be carried out by professionals to prevent static electricity from damaging components
Product details picture:

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