Details
KLA Tencor 710-664601-000 Interface Board
Product manual:
The product application areas of KLA Tencor 710-664601-000 interface board are mainly concentrated in semiconductor manufacturing and testing equipment, serving as a key signal and data transmission hub, including:
Product application areas
Semiconductor wafer inspection system
Used in wafer surface defect detection and critical dimension measurement equipment,
Realize high-speed and stable communication between different modules.
Supports scanning electron microscopy (CD-SEM)
Signal transmission of optical defect detection systems (such as Surfscan) and other equipment.
Equipment Control and Data Collection
Connect sensors, actuators, and processing units in the device control system,
Ensure that all parts of the equipment work together.
Responsible for collecting and transmitting high-precision measurement data for process monitoring and quality analysis.
Automated production line integration
As an interface bridge, realize the detection equipment and production line control system
Data exchange between MES and factory automation systems.
Support remote diagnosis and real-time monitoring of devices to improve production efficiency and yield.
Multi system module interconnection
Support electrical connections between different functional modules,
Interfaces for power management, signal processing, and mechanical motion control modules.
Ensure overall system stability and response speed.
Typical application scenarios
Pre process testing in chip manufacturing plants
High precision process control and yield improvement project
Rapid identification and feedback of wafer defects
Integration of key equipment for advanced processes (7nm and below)
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