Details
KLA Tencor 710-678272-0C1 Optical Level Sensor
Product manual:
KLA Tencor 710-678272-0C1 Optical Level Sensor
Mainly used in optical systems for semiconductor manufacturing and testing equipment, specific product application areas include:
Product application areas
Semiconductor wafer defect detection system
Used in optical defect detection equipment for real-time monitoring of light source intensity and stability,
Ensure detection accuracy and imaging quality.
Support high-sensitivity detection of wafer surface defects to improve product yield.
Critical Dimensional Measurement System (CD-SEM)
Optical focusing and imaging adjustment in auxiliary electron microscopy systems,
Ensure the clarity and measurement accuracy of scanning electron microscopy.
The feedback from the optical level sensor helps the system automatically adjust the optical path, ensuring the reliability of the measurement data.
Auto focus and light path adjustment
In automated detection equipment, autofocus control is achieved through light intensity feedback,
Improve scanning and detection efficiency.
Real time monitoring of optical path changes to ensure the stability of equipment during long-term operation.
Online monitoring in semiconductor manufacturing process
As an optical sensing unit in process control, it supports optical monitoring and quality control of manufacturing equipment.
Assist in optimizing process parameters of the production line through light level data feedback.
Typical application scenarios
Monitoring of Light Source Intensity in Optical Detection Systems
High precision autofocus system
Defect detection and process control in semiconductor manufacturing plants
Scanning electron microscope imaging adjustment
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