KLA Tencor 710-806051-01 Single Axis Controller

Brand:KLA-Tencor
Model:710-806051-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

KLA Tencor 710-806051-01 Single Axis Controller

Product manual:

KLA Tencor 710-806051-01 is a single axis motion controller designed for precision equipment,
Commonly found in KLA Tencor's wafer inspection and metrology equipment.
Its main function is to control the precise motion of a certain mechanical axis (such as a linear sliding table or a rotating platform),
Ensure that the detection system has high repeatability and response speed during scanning or alignment processes.

[Product Application Fields]
1. Semiconductor wafer surface inspection system
Typical devices: such as Surfscan, SP1, SP2, 2360, etc

Function: Drive precise movement of optical sensors or probes to achieve high-resolution scanning of wafer surfaces,
Detect micro defects such as particles, scratches, and foreign objects.

2. Precision Alignment Systems
Application method: Control a separate motion axis inside the device to achieve lens
Accurate positioning of laser or sample stage.

Typical operation: Nano level alignment adjustment to ensure optical path consistency.

3. Wafer handling and robotic arm system
Purpose of use: In wafer automatic transfer or probe positioning systems,
Perform precise linear or rotational movements in conjunction with inter station transmission.

Advantages: High speed response, smooth movement, excellent error control.

4. Scanning motion of optical detection platform
Control objective: Single axis motion of the scanning table or platform (such as X-axis, Y-axis, Z-axis, or θ axis).

Supporting equipment: laser scanner, confocal microscopy system, etc.

5. Wafer thickness or flatness measurement system
Control content: By driving Z-axis displacement, the probe or optical head can scan different heights of points.

Key parameters: sub micron accuracy, closed-loop feedback, high stability.

Summary of Characteristics