Details
KLA Tencor 712-450673-00 processing module
Product manual:
KLA Tencor 712-450673-00 Processing Module - Detailed Product Application Field Description
Product Introduction:
The 712-450673-00 processing module is a key data processing unit designed by KLA Tencor for its electron beam (E-beam) wafer defect detection equipment.
Detailed application areas:
1. Electron beam wafer defect inspection (E-beam Inspection)
In the semiconductor manufacturing process, wafer defect detection is an important link to ensure chip quality.
Support defect detection at the sub micron and even nanometer levels to meet the needs of advanced process technologies.
2. High performance data processing and real-time analysis
This module has powerful computing capabilities and can process large amounts of scanned data in real time
3. System integration and signal synchronization
The processing module, as the core part of the system, is responsible for coordinating with other modules
Signal interaction of (such as scanning control module, image acquisition module, motion controller, etc.),
Realize the synchronization and stability of the overall operation of the equipment.
By precise timing control, the overall efficiency and accuracy of the detection system can be improved.Reduce downtime.
It has strong compatibility and can adapt to different models of KLA Tencor electron beam detection equipment.
Typical application environment:
Semiconductor manufacturing companies, such as TSMC, Samsung, Intel, and other globally leading wafer fabs,
Use this module to improve the accuracy and speed of wafer defect detection.
R&D laboratory and process development center: used for advanced process development stage,
Accurately detect potential defects in new processes to ensure product quality.
Quality control and reliability testing: used in the quality control process of the production line,
Real time detection and analysis to reduce defect rates and product scrap rates.
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