Details
KLA Tencor 720-21901-003 Interface Board
Product manual:
KLA Tencor 720-21901-003 Interface Board (usually labeled SCAN AMP ASSY)
It is an important electronic component used by KLA Tencor in its optical and metrology equipment.
Application areas of KLA Tencor 720-21901-003 interface board:
1. Semiconductor wafer inspection system
Application Description: Used in wafer surface defect detection system,
Realize the amplification and output of analog signals received from scanning optical systems.
Target task: Improve the quality of image acquisition signals to ensure high sensitivity and stability in defect detection and analysis.
Typical supporting equipment: KLA 2xxx, 5xxx, 6xxx series detection platforms.
2. Pattern overlay measuring equipment
Application Description: In the measurement of multi-layer pattern alignment accuracy,
Process the interference or imaging signals output by the optical system through the interface board.
Target task: Support high-resolution image sampling and provide accurate coordinate reference signal transmission.
Function positioning: Located between the imaging system and the Data Acquisition Board, serving as a bridge.
3. Optical scanning system
Application description: Collecting reflected or transmitted signals in the optical scanning head inside the device,
After amplification and filtering through the interface board, it is sent to the control module.
Target task: Enhance weak light signals and adapt to the processing capabilities of subsequent circuits.
4. Automation equipment control system
Target task: Coordinate the precise coordination between the scanning process and displacement control to improve scanning accuracy.
Product details picture:

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