Details
KLA Tencor 720-23461-000 Wafer Inspection Tool
Product manual:
KLA Tencor 720-23461-000 Wafer Inspection Tool (ADG Board)
Product type: ADG (Analog Digital Generator) board
Manufacturer: KLA Tencor
Part number: 720-23461-000
Product application areas
Electron Beam Wafer Inspection System (E-Beam Inspection)
Applied in high-precision electron beam wafer inspection equipment,
Mainly processes analog signals received from electron beam detectors and converts them into digital signals that can be analyzed by the system.
It is a key hardware module for achieving high-resolution imaging and defect recognition.
Advanced Process Control
In 7nm, 5nm, and more advanced manufacturing processes,
The detection equipment supported by this board can identify extremely small defects, improving the quality and yield of wafer production.
Helps to detect process fluctuations, material abnormalities, or doping deviations, improving overall process stability.
Yield Analysis of Semiconductors
By collaborating with image processing systems, precise extraction and classification of wafer surface particles
Provide quantitative data to support yield management and failure analysis for pattern defects, pressure damage, and other information.
Front End Process Monitoring
After key process steps such as photolithography, etching, and ion implantation, non-destructive testing is performed on the wafer,
Ensure that the alignment and integrity of each layer of pattern meet the process requirements.
Key control modules of the detection system
As one of the core hardware components of the signal acquisition link, this module directly affects the data acquisition speed of the entire machine
Signal processing accuracy and image output quality, suitable for equipment maintenance and functional upgrades.
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