Details
KLA Tencor 720-23475-000 Controller Module
Product manual:
KLA Tencor 720-23475-000 Controller Module
It is one of the core control units designed specifically for advanced semiconductor detection and measurement equipment of KLA Tencor.
It is typically integrated into high-precision systems to coordinate the operation of mechanical, optical, electrical, and data processing subsystems,
1、 Product Overview
Model: 720-23475-000
Type: Controller Module
Platform: KLA Tencor 720 Series
Function: Perform system control tasks, signal management, data processing, communication coordination
2、 Product application areas
1. Wafer defect detection system
Control the motion of the scanning platform, coordinate the rhythm of image acquisition with the laser/optical path.
Collaborate with the image processing module to achieve defect analysis, labeling, and classification.
2. Automatic Optical Inspection (AOI) equipment
Used to coordinate the synchronization of image acquisition heads, lighting systems, and platform positioning units.
Control the trigger signal of the high-speed camera to ensure no frame loss during the scanning process.
3. Morphology and thickness measurement system
Drive the interferometric measurement head, control the Z-axis or tilt axis movement, and achieve nanoscale thickness scanning.
Supports high-frequency data acquisition and closed-loop feedback, suitable for dynamic process control.
4. Electron beam detection or post lithography detection system
As the main control part of the device, it executes e-beam path control, deflection logic, and collaborative processing with the sample platform.
Collaborate with high-speed sampling cards to achieve imaging and processing task scheduling.
5. Wafer handling and automatic alignment system
Control the actions of the robotic arm, vacuum suction cup, rotating device, etc., to achieve the functions of alignment, transportation, and switching of blades.
Realize rapid response, safety interlocking, and process continuity.
Product details picture:

720-23475-000
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