Details
KLA Tencor 830-23611-000 power module
Product manual:
KLA Tencor 830-23611-000 Power Module - Introduction to Application Fields
This power module is a key power supply component in KLA Tencor semiconductor testing equipment,
Responsible for providing stable and reliable power support for multiple electronic modules within the device, ensuring the stability and safety of the overall operation.
Main application areas:
Power supply for semiconductor wafer testing equipment
For optical scanning systems, motion control units
Core components such as image processing modules provide precise voltage regulation power supply;
Ensure the voltage and current stability of the detection equipment under different workloads,
To avoid equipment malfunctions or detection errors caused by power fluctuations.
Automation equipment power management
Power supply system suitable for semiconductor manufacturing automation equipment;
Supports multiple outputs to meet the diverse voltage requirements of complex systems.
System Protection and Security Design
Equipped with overvoltage, overcurrent, and short-circuit protection functions to improve the safety of equipment use;
Support hot swapping and redundant backup design to enhance system reliability.
Equipment maintenance and monitoring
Equipped with a status monitoring interface, supporting real-time monitoring of power status and fault diagnosis;
Can communicate with the device control system to achieve remote monitoring and management.
Typical application devices:
KLA Tencor wafer surface inspection instrument and its subsystems;
High precision motion control and optical detection platform;
Automated testing and metrology equipment in semiconductor manufacturing.
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