Novellus Systems 02-00315-00 Sensor Board

Brand:Novellus Systems
Model:02-00315-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Novellus Systems 02-00315-00 Sensor Board

Product manual:

Novellus Systems 02-00315-00 Sensor Board
Mainly used in semiconductor manufacturing equipment, responsible for collecting and processing signals from various sensors.
These sensors may include detection equipment for key process parameters such as temperature, pressure, and flow rate, ensuring that the equipment can monitor and adjust process conditions in real time.

The application areas of the product include:

Collect analog and digital signals such as temperature, pressure, and flow rate in the equipment.

Convert sensor signals into a standard format that can be processed by the control system.

Collaborate with the main controller and I/O module to achieve real-time process monitoring.

Support precise process control and automated operation of semiconductor equipment.

Applied to Novellus' CVD, PVD, ALD and other deposition equipment.

Provide high reliability and stability, suitable for special environments such as clean rooms.

Support fault detection and alarm functions to ensure equipment safety.

Modular design facilitates maintenance and upgrades.