Novellus Systems 02-032374-00 Interlocking Board

Product manual:

Novellus Systems 02-032374-00 Interlock Board
Its main function is to perform hardware interlocking and security logic judgment during device operation,
Ensure that all systems are started, run, or shut down under safe conditions,
To protect the safety of equipment and operators, and prevent equipment misoperation or abnormal damage.

1、 Basic Product Information
Product model: 02-032374-00

Product Name: Interlock Board

Manufacturer: Novellus Systems, Inc. (now a subsidiary of Lam Research)

Application location: Installed in the system main control chassis or interlocking control subframe

Category: Security Logic Control Module/Hardware Level Security Monitoring

2、 Core functions
Function module description
Interlocking logic processing makes real-time logical judgments on multiple safety conditions, such as door locks, air pressure, vacuum status, temperature, etc.
The status monitoring and alarm output monitoring subsystem monitors the operating status, and immediately triggers an alarm or interlock closure action when abnormal conditions occur.
External signal interface management interacts with multiple sensors, access switches, flow/temperature controllers, and other modules for signal exchange.

3、 Typical application scenarios
Access control interlock control
Ensure that the operating door cannot be opened when the chamber is in a high temperature, high pressure, or vacuum state.

Gas safety interlock
Check whether the gas flow rate is stable, whether the leak detection is safe, and control the MFC or main gas source to cut off.

Vacuum system interlock
Check whether the chamber has reached the set vacuum level, control the opening and closing of valves or the heating start and stop of the chamber.

Temperature control protection interlock
Automatically stop heating and sound an alarm when the chamber heater or chamber temperature exceeds the standard.

RF power interlock
Ensure that the RF system can only be turned on after all process prerequisites are in place to avoid breakdown or false discharge.

Product details picture:

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