Novellus Systems 03-10484-00 Interface Board

Brand:Novellus Systems
Model: 03-10484-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Novellus Systems 03-10484-00 Interface Board

Product manual:

The Novellus Systems 03-10484-00 Interface Board is a specialized electronic module used in Novellus semiconductor equipment,
Mainly responsible for the transfer, conversion, and interface connection functions of control signals in the system.
This interface board serves as a signal hub between multiple subsystems and plays a critical role in the process control flow.

1、 Basic Information
Project Content
Product Name: Interface Board
Product model 03-10484-00
Manufacturer Novellus Systems Inc. (now Lam Research)
Application Type Control Signal Bridge/Input/Output Interface Module
Common systems include Concept series, ALTUS series, INOVA series, and other CVD/PVD/ALD equipment

2、 Core functions
Function Category Function Description
Signal bridging transfers control signals and status signals between the main control system and peripherals
Multi channel I/O management connects multiple sensors, actuators, valve controllers, temperature control units, etc
Protocol/level conversion between different communication formats such as TTL, RS232, RS485, etc
Signal isolation prevents high voltage or interference signals from directly affecting the main control circuit
Some versions of the fault diagnosis interface come with onboard status indicator lights or test points for easy maintenance

3、 Typical application scenarios
This interface board mainly serves the control link layer in the following systems:

Process Gas Control Unit (MFC Control)

Pressure monitoring system

Heating/cooling platform control module

Vacuum pump control and feedback

Chamber valve actuator drive

Safety interlock and door lock system