Details
Novellus Systems 03-10639-00 Interface Board
Product manual:
The Novellus Systems 03-10639-00 Interface Board is a signal interface and connection management module specifically designed for use in Novellus semiconductor equipment systems. This board mainly serves as a signal bridge node between the central controller and peripheral modules, playing an important interface coordination role in the entire device control link.
1、 Basic Information
Project Content
Product Name: Interface Board
Model 03-10639-00
Manufacturer Novellus Systems Inc. (now Lam Research)
Customized electronic control interface board for component category
Typical position control box, main controller backplane, I/O wiring area
Main applications include signal bridging, relay distribution, protocol conversion, and electrical isolation
2、 Core functions
Function Category Function Description
The signal interface bridges the signal transmission between the CPU control board and downstream control units such as actuators, sensors, valve controllers, etc.
I/O management provides multiple digital or analog input/output interfaces, supporting high-precision control signal transmission.
Protocol conversion can undertake signal matching tasks between different interfaces such as serial/parallel ports, TTL/RS485, etc.
System integration realizes the collaborative cooperation of multiple boards or control units in a set of equipment systems.
3、 Application scope (speculated)
This board is widely used in Novellus' multi generation core devices, including but not limited to:
Concept One/Two/Three series CVD systems
ALTUS series ALD/sedimentation equipment
Speed/INOVA series high-throughput deposition platform
In these systems, the interface board typically:
Connect the main control processor (such as 03-XXXXX control module)
Allocate control signals to executing components (solenoid valves, stepper motors, lifting mechanisms, etc.)
Connect sensors or feedback circuits (temperature, pressure, position detection, etc.)
Product details picture:

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