Novellus Systems 03-132056-00 Sensor Board

Product manual:

The Novellus Systems 03-132056-00 Sensor Board is an electronic control board used in Novellus semiconductor process equipment, specifically responsible for the acquisition, conversion, and transmission of sensor signals. It is typically used as a key detection unit in the system and works in conjunction with the main control system to achieve precise control.

1、 Basic Information
Product Name: Sensor Board

Model: 03-132056-00

Manufacturer: Novellus Systems Inc. (now a subsidiary of Lam Research)

Type: Process control dedicated sensor interface board

Installation location: commonly found in equipment chambers, under platforms, or within the main control framework

2、 Main functions
signal acquisition

Receive input signals from multiple analog or digital sensors, such as temperature, pressure, position, flow rate, etc.

Signal conditioning/conversion

Provide necessary signal amplification, filtering, isolation, level conversion and other processing functions.

data transmission

Send the processed sensor data to the control unit or upper computer to achieve real-time feedback control.

Multi channel support

Can connect multiple sensors, support multi-point synchronous monitoring, and improve control accuracy.

3、 Example of Application Devices
This sensor board is used in various core devices of Novellus, especially in the following systems:

Concept series CVD system

Speed series SACVD/HDPCVD system

ALTUS Metal Deposition System

It typically serves the following subsystems:

Vacuum chamber monitoring (vacuum degree, temperature)

Process gas flow monitoring

Platform temperature control system

Mechanical arm/lifting device position detection

Product details picture:

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