Novellus Systems 03-137064-00 Interface Vector Board

Brand:Novellus Systems
Model: 03-137064-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Novellus Systems 03-137064-00 Interface Vector Board

Product manual:

The Novellus Systems 03-137064-00 Interface Vector Board is a high-density signal interface board specifically designed for Novellus semiconductor equipment. It is mainly used for the input/output connection and distribution of multi-channel signals in process control systems. This board is designed to distribute complex control signals (usually process related analog and digital signals) from the main control system to multiple submodules, or input them from multiple sensors into the control system.

1、 Basic Information
Project Content
Product model 03-137064-00
Product Name: Interface Vector Board
Manufacturer Novellus Systems Inc. (now part of Lam Research)
Category: High channel density signal interface board
Typical applications include I/O signal distribution, centralized wiring, and multi module signal bridging

2、 Core functions
Functional category description
High density signal access provides a large number of channel support, connecting multiple groups of sensors, actuators, or signal control lines
Signal vector allocation distributes signals from the main control to different equipment control nodes (such as valves, electric heating, pressure control, etc.) according to process logic
The centralized wiring platform serves as an interface transfer board for centralized wiring, convenient maintenance, expansion, or reconfiguration
Signal isolation protection board includes optocouplers and protection circuits to prevent the impact of static electricity, power surges, and other factors on the control system
Highly scalable design supports modular expansion and can connect multiple cables to the backplane or front panel

3、 Typical application devices

Concept Two/Three series CVD systems

ALTUS ALD series metal deposition system

INOVA PVD system

Speed series (SACVD/HDPCVD)

Mainly installed in:

Main Control Cabinet

IO Interconnect Panel

Process chamber peripheral wiring board group (Chamber Harness Connection)