Novellus Systems 03-145147-00 Interface Automation Board

Brand:Novellus Systems
Model: 03-145147-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Novellus Systems 03-145147-00 Interface Automation Board

Product manual:

Novellus Systems 03-145147-00 Interface Automation Board is a critical control interface module used in Novellus semiconductor equipment,
Mainly responsible for signal automation access between various subsystems of the equipment
Distribute and coordinate to ensure efficient and stable operation of equipment processes.

The application areas of Novellus Systems 03-145147-00 interface automation board products are as follows:
Automatic distribution and management of control signals
Realize signal coordination and linkage between the main control system and various actuators (such as valves, pumps, heaters) to ensure process automation.

Process automation interface support
Widely used in the process flow of CVD, ALD, PVD and other equipment to control key parameters such as gas on/off, temperature regulation, and chamber vacuum.

Linkage with I/O module and communication module
Used to connect and manage multiple input and output signals, supporting multiple types of interface standards, and improving the efficiency of internal signal interaction in devices.

Interface bridge between sensors and actuators
Receive feedback signals from sensors (such as pressure, temperature, flow rate) and transmit instructions from the main control system to on-site equipment.

Components of equipment interlocking and protection system
Participate in safety logic judgment to respond to and protect against abnormal device states such as lid opening, overvoltage, and undervoltage.

Improve system integration and maintainability
Board based and modular design facilitates equipment wiring, installation, and quick replacement or diagnosis in the later stage.

Suitable for various Novellus platform devices
Applied to mainstream platforms such as the Concept series and ALTUS series, it serves as an indispensable automation interface unit in control systems.