Novellus Systems 03-164888-00 Converter Board

Product manual:

Novellus Systems 03-164888-00 Converter Board
It is a specialized electronic module used in Novellus semiconductor equipment,
Mainly responsible for the format conversion, logic level matching, interface protocol relay and other functions of electrical signals,
Usually used as a data bridge or signal adapter between the main control system and subsystems,
Ensure stable communication and collaborative work between different modules within the system.

1、 Basic Product Information
Product model: 03-164888-00

Product Name: Converter Board

Manufacturer: Novellus Systems (now a brand under Lam Research)

Main function: Conversion and adaptation of electrical signals/communication protocols/levels

Typical use: Embedded in Novellus process equipment such as CVD, PVD, PECVD, etc., used for signal distribution and interface matching

2、 Core functions and purposes
Functional category description
Signal level matching provides interface voltage buffering between high/low level systems to avoid signal damage.
Interface type relay realizes logical connections between various physical ports (DB9, RJ45, pin headers, etc.).
System isolation protection provides electrical isolation to prevent high voltage or interference signals from affecting the stable operation of the main control system.
Signal shaping/amplification is used to shape and amplify long-distance or high impedance signals, improving system response speed and anti-interference ability.

3、 Typical application scenarios
This converter board is typically used in the following Novellus series devices:

Concept series (CVD)

ALTUS (W-material deposition)

INOVA / SPEED（PVD / PECVD）

Perform the following tasks in the system:
Signal conversion between control motherboard and I/O interface board

Interface adaptation between RF control unit and plasma power regulation circuit

Data connection between vacuum system signals (such as pressure sensors, solenoid valves) and the central controller

Convert the output of the optocoupler/relay into a system recognizable standard logic level input

Product details picture:

03-164888-00

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