Novellus Systems 03-167697-00 Interface Board

Brand:Novellus Systems
Model:03-167697-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Novellus Systems 03-167697-00 Interface Board

Product manual:

Novellus Systems 03-167697-00 Interface Board
It is a key electronic module used in Novellus semiconductor process equipment,
Mainly used for signal interaction, communication control, and functional expansion between the device control system and other functional modules.
It is widely used in equipment platforms such as plasma etching (PECVD) and chemical vapor deposition (CVD), and is an important bridge connecting logic control and hardware execution systems.

1、 Basic Product Information
Brand: Novellus Systems (acquired by Lam Research)

Model: 03-167697-00

Product Name: Interface Board

Main applications: signal management, module communication, I/O allocation, protocol conversion

2、 Main functions
Function Description
Signal relay and conversion achieve signal matching, format conversion, and stable transmission between the main control unit and the executing components.
I/O control manages analog/digital input/output signals, supporting connections with sensors, actuators, valves, and other devices.
The communication interface supports standard industrial communication protocols such as RS-232, RS-485, TTL, CAN, etc.
The system integration interface provides physical and logical connection channels for the main controller, power module, display unit, or processing unit.
Fault isolation reduces signal interference between the main control unit and peripheral devices, improving system stability and electromagnetic compatibility.

3、 Typical application areas
CVD/PECVD process platform
Manage signal interaction for gas flow control systems (MFC), temperature control systems, vacuum chamber sensors, etc.

Machine control system
Realize synchronous coordination and operational status feedback of various subsystems within the device.

Automated process monitoring and feedback
Collect equipment operation data, alarm status, control commands, and transmit them in real-time.