Novellus Systems 03-169460-00 Interlocking Board

Brand:Novellus Systems
Model: 03-169460-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Novellus Systems 03-169460-00 Interlocking Board

Product manual:

The Novellus Systems 03-169460-00 interlock board is a safety control module designed specifically for Novellus semiconductor equipment,
Mainly used for real-time monitoring and interlocking management of key states during equipment operation,

The application areas of Novellus Systems 03-169460-00 interlocking board products are as follows:
Equipment safety control system

Vacuum system interlock control
Determine whether the vacuum chamber pressure meets the standard. If it does not meet the conditions, prohibit process operation to avoid equipment damage or process failure.

Interacting with the main controller
Upload the interlocking signal to the system control board to form a closed-loop process safety logic control.

Suitable for multiple Novellus platforms
Commonly used in devices such as the Concept series and ALTUS series to achieve multi-point collaborative interlocking functionality.

Fault alarm and maintenance assistance
If a certain safety condition is not met, the board can output diagnostic information for engineers to quickly locate the problem.

Summary:
The Novellus 03-169460-00 interlocking board is one of the core control nodes for the operation of "safety logic" in equipment,
Widely used in the detection and linkage control of critical safety states in semiconductor manufacturing equipment,
It is an important component of ensuring the safe operation of equipment and personnel protection.