Novellus Systems 03-169460-00N Interlocking Board

Product manual:

Novellus Systems 03-169460-00N interlock board is a safety monitoring and interlock control module used in semiconductor equipment,
The main function is to monitor the real-time operation status, door control protection, gas source pressure, power status and other key conditions of the equipment,
And prevent system startup or forced shutdown when conditions are not met to ensure personnel safety and equipment stability.

The following are the main application areas of this module:

Safety door and cavity lock control
Monitor whether the equipment door is closed properly to prevent high-risk processes from operating while the door is open.

Vacuum and air pressure interlock
Check whether the pressure in the vacuum chamber meets the standard, whether the gas supply is normal, and prevent process abnormalities.

Power supply and temperature control safety monitoring
Check whether the heater and cooling system are in a safe state to avoid overheating or power failure.

Process initiation permit logic
Link multiple safety signals as a condition judgment module before starting the process.

Emergency shutdown in abnormal state
Once the interlocking conditions are triggered (such as door opening, low air pressure, abnormal voltage, etc.), the system operation will be immediately interrupted.

Communicate with the main control system
Feedback the safety status to the main controller to achieve centralized safety management.

Equipment maintenance and protection
Provide safety barriers in maintenance mode to ensure that equipment does not malfunction during engineer operation.

Suitable for various Novellus devices
Including but not limited to multi generation process equipment platforms such as Concept series, ALTUS, INOVA, etc.

This board belongs to the core module of the device security architecture and is usually installed in the main control cabinet or I/O interface area,
It needs to work in conjunction with the main controller, I/O board, actuators, and sensors.

Product details picture:

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