Novellus Systems 03-252263-00 System Controller Module

Brand:Novellus Systems
Model:03-252263-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Novellus Systems 03-252263-00 System Controller Module

Product manual:

Novellus Systems 03-252263-00 System Controller Module
It is one of the core control units used in Novellus semiconductor equipment (such as CVD, PVD, PECVD and other process systems),
Mainly responsible for the operation logic of the entire equipment, coordination and control between various subsystems, and data communication with the upper computer, it is an important component of the "brain" of the equipment.

1、 Basic Product Information
Brand: Novellus Systems (now a brand under Lam Research)

Model: 03-252263-00

Type: System Controller Module

Functional positioning: The main control core of the device coordinates the operation of various sub modules, controls the process flow, processes on-site data, and provides feedback on system status

2、 Core functions
Function item description
The main control logic manages the entire process flow of the equipment, including heating, gas transportation, vacuum control, chamber status monitoring, etc.
Communicate with subsystems through serial interfaces (RS-232/485), CAN, Ethernet, and other methods to communicate with valve control modules, power modules, I/O interface boards, etc.
State monitoring and alarm real-time collection of the operating status of each submodule, and issuing alarms in case of abnormalities for interlocking protection.
Control the complete process of power on, heating, process operation, cleaning, and shutdown for equipment startup and shutdown, ensuring safe operation.
The human-machine interface communicates with the operation panel or upper computer, providing real-time data display and control interfaces.

3、 Typical application areas
This module is typically deployed on the following Novellus device platforms:

Concept One/Two/Three CVD Series

ALTUS, Sequel, Speed, INOVA and other PVD/PECVD series

Multi cavity devices with embedded or centralized control structures

The core control system typically includes:

Mass Flow Controller (MFC)

Thermal control system (chamber heating/cooling)

Vacuum system (valve group, pump station)

Plasma generator (RF power control)

Safety interlock and alarm system