Novellus Systems 03-281423-06 System Controller
Brand:Novellus Systems
Model:03-281423-06
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
Novellus Systems 03-281423-06 System Controller
Product manual:
Novellus Systems 03-281423-06 System Controller
It is a key control component in Novellus (now part of Lam Research) semiconductor manufacturing equipment,
Widely used in process systems such as CVD, PECVD, PVD, etc,
Responsible for the core logic management, process control flow execution, subsystem coordination, and communication of the entire machine.
It is the brain of the device, ensuring that multiple modules operate collaboratively under high-precision and high-efficiency conditions.
1、 Basic Product Information
Product model: 03-281423-06
Product Name: System Controller
Manufacturer: Novellus Systems, Inc
Applicable platform: Commonly used in Novellus series devices such as Concept Two/Tree, Sequel, INOVA, ALTUS, SPEED, etc
Function type: Main control board/Embedded control platform
2、 Core functions
Function Description
The entire process of process control equipment includes vacuum control, heating/cooling curves, gas ratio and flow rate, RF plasma power matching, etc.
The human-computer interaction interface communicates with the operator through a display terminal or touch screen, receiving process parameters, display status, and alarms.
Remote monitoring and data interface support communication with the upper computer system (Ethernet/RS-232/485), facilitating data transmission and remote maintenance.
The alarm and interlocking system detects the real-time operation status of key systems, triggers fault alarms, executes safe shutdown or interlock protection mechanisms.
3、 Typical application system
This controller is compatible with key process steps such as deposition or etching in the following Novellus series devices:
Concept Two/Tree CVD System
INOVA Copper Interconnection Deposition System
ALTUS tungsten deposition system
Sequel PECVD system
SPEED PVD system
In these platforms, the module mainly controls the following subsystems:
Chamber temperature heating/feedback system
MFC gas flow control system
Vacuum valve system (including gate valve, butterfly valve)
Logic start stop and power allocation of RF/power system
Safety interlock and alarm output
Product details picture:
03-281423-06
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