Novellus Systems 03-290206-00 Controller Module

Brand:Novellus Systems
Model:03-290206-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

Novellus Systems 03-290206-00 Controller Module

Product manual:

Novellus Systems 03-290206-00 Controller Module
It is a key control component used in Novellus semiconductor equipment (such as CVD, PECVD, PVD deposition systems),
Mainly responsible for centralized management and logical control of process flow, actuators, sensors, and subsystems.
It is one of the core modules that ensures process accuracy and automated operation of equipment.

1、 Product Overview
Brand: Novellus Systems (now a subsidiary of Lam Research)

Model: 03-290206-00

Name: Controller Module

Functional positioning: Embedded device control logic execution unit, coordinating the linkage and parameter control of various subsystems within the device

2、 Core functions
Function module description
The central processing unit is equipped with industrial grade microprocessors or embedded control chips, which run device control firmware or process programs.
The process control executes core tasks such as gas flow control, heating/cooling curve control, and vacuum system logic.
Signal input/output management for multiple I/O channels (analog, digital, PWM, etc.), connecting devices such as valves, thermostats, pressure sensors, etc.
The communication function provides the ability to communicate with the upper computer or main control system through serial ports (such as RS-232/485), Ethernet, CAN Bus, etc.
Real time monitoring module for fault diagnosis and feedback, with functions such as alarm, locking, and data feedback.

3、 Application Fields
This controller module is widely used in Novellus series devices, including but not limited to:

Concept One/Two CVD System

Speed/Sequel PECVD series equipment

ALTUS copper deposition equipment

INOVA Barrier/Sead PVD Series

It is mainly responsible for controlling the following subsystems in the device:

MFC (Mass Flow Controller)

Chamber heater/thermocouple system

Logic control of vacuum pump and valve

RF power matching/start stop

Security interlock and status feedback