Novellus Systems 03-417236-00 Interface Board

Brand:Novellus Systems
Model: 03-417236-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Novellus Systems 03-417236-00 Interface Board

Product manual:

The Novellus Systems 03-417236-00 Interface Board is a specialized communication and control bridging module used in Novellus semiconductor process equipment. It mainly undertakes the signal conversion, relay, and module interconnection functions within the system, and is a key component for achieving multi module collaborative control of the equipment.

1、 Basic Information
Product Name: Interface Board

Product model: 03-417236-00

Manufacturer: Novellus Systems Inc. (merged into Lam Research)

Component type: Control communication bridge module/Multi channel I/O interface board

Typical applications: signal transmission between modules, electrical connections, data channel relay

2、 Core functions
Function type description
Signal allocation and conversion are used to transfer, condition, and transmit control signals from the main control system to various subsystems (such as valve control boards, sensor modules, etc.)
Multi channel I/O support supports multiple analog/digital inputs and outputs, used to control multiple external devices or sensors
Bus relay bridging may connect channels between multiple communication protocols (such as RS232, RS485, CAN, I ² C, SPI, etc.)
The system integration bridge serves as the "central node" between the CPU control module and downstream execution modules
Electrical isolation protection includes signal isolation and surge protection, which improves the overall stability and anti-interference ability of the system

3、 Application device scenario (speculated)
This interface board may be widely used in the following device series of Novellus:

Concept series (PECVD/SACVD/HDP)

ALTUS series (ALD)

Speed series (metal deposition)

INOVA or VECTOR platform

In these systems, the board may be connected to the following device subsystems:

Process Gas Control Module (MFC Control)

Vacuum pump controller and pressure sensor

Chamber heater/cooling system

Electric valve control unit

Main controller/PLC communication path