Novellus Systems 061-00684-0011 Interface Vector Board

Brand:Novellus Systems
Model: 061-00684-0011
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Novellus Systems 061-00684-0011 Interface Vector Board

Product manual:

Novellus Systems 061-00684-0011 Interface Vector Board is a specialized control interface module used in Novellus semiconductor manufacturing equipment.
The main function of this module is to serve as a signal bridge between the system controller and various actuators and sensors,
Centralized management and distribution of digital, analog, or communication signals is one of the key central components in equipment process automation control systems.

The main application areas of the Novellus 061-00684-0011 interface vector board are as follows:
Distribution of process control signals
Used to distribute the signals output by the main controller to the heaters MFC、 Execution/detection components such as vacuum valves and position sensors.

Centralized signal management and conversion
Collect input signals from multiple sensors and feedback modules in the centralized collection device and upload them to the main control system,
Supports digital, analog, and multiple communication formats.

Support complex CVD/ALD/PVD process equipment
Widely used in sedimentation equipment such as the Novellus Concept series and ALTUS series,
As a intermediary platform in the process execution and feedback chain.

Equipment status interlocking and safety logic support
Before starting the device, the vector board is connected to the interlocking signal to participate in determining whether to allow the start,
Whether the door lock is closed and the cavity is evacuated.

Standardization of system module interfaces
As a standard interface platform, this board unifies the access methods of different modules,
Facilitating system integration and wiring.

Adapt to multiple subsystems
Can connect multiple sub modules such as power module, cooling module, and air circuit module,
Realize fast signal interaction between modules.

Used for equipment debugging and maintenance
Used in engineering mode to read real-time signal status
Execute component response and assist in quickly locating equipment issues.