Details
Novellus Systems 26-169462-00 DC Power Board
Product manual:
Novellus Systems 26-169462-00 DC Power Board
It is a power module designed specifically for Novellus semiconductor process equipment,
Mainly used to provide stable DC power support for internal control systems, sensors, actuators, etc. of equipment.
This module is widely used in high-precision equipment such as CVD, PVD, ALD, etc., and is one of the key components to ensure the normal operation of the equipment and the stability of the control system.
The application areas of Novellus Systems 26-169462-00 DC power board products are as follows:
Provide stable power supply for the control system
Provide power to the main control CPU board, I/O interface board, communication module, etc. to ensure the normal operation of the system's core logic circuit.
Drive actuators and peripheral modules
Provide the required DC driving voltage to valve controllers, relay modules, pumps, electromagnetic devices, etc.
Process module power supply guarantee
Support the operation of low-voltage systems such as sensors, thermocouple amplifiers, and gas monitoring in the process module.
Various DC power conversion and distribution for semiconductor equipment
Convert input power (such as AC or high voltage DC) into multiple required voltage levels (such as+5V,+12V,+24V, etc.) for use by different modules.
Integrated voltage protection and current limiting function
Built in short-circuit protection, overload protection, surge protection and other mechanisms enhance the safety and fault resistance of equipment operation.
Ensure the stability of the electrical system of the equipment
Provide high-precision, low-noise regulated output to prevent voltage fluctuations from affecting critical process accuracy.
Adapt to multiple Novellus process equipment platforms
Commonly used on process platforms such as the Concept series and ALTUS series as general or specialized power components.
Simplify maintenance and replacement
Board based design facilitates rapid module replacement, reduces equipment downtime, and improves production line operational efficiency.
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