TEL Tokyo Electron 049-0001007-1 Explosion proof Module
Brand:TEL Tokyo Electron
Model:049-001007-1
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 049-0001007-1 Explosion proof Module
Product manual:
Product Name: 049-0001007-1 Explosion proof Module
Manufacturer: Tokyo Electron Ltd
Product type: Explosion Proof Module/Intrinsic Safety Barrier
1、 Product Overview
The explosion-proof module 049-0001007-1 is an intrinsic safety electrical isolation module used in Tokyo Electron semiconductor equipment,
Used to ensure the safe operation of electrical control systems in environments with specific combustible gases or hazardous process gases.
Its function is to provide electrical isolation, prevent electric sparks, control short-circuit energy in the system, and comply with explosion-proof or intrinsic safety regulations.
2、 Core functions
Electrical isolation protection
Electrical isolation of control signals, power or sensor circuits to prevent high-energy interference or short circuits from spreading to hazardous areas.
Limit electrical energy output
Limit the voltage and current transmitted to the on-site equipment through the module to below the detonation energy, to prevent sparks or overheating caused by faults.
fail safe
The module will automatically disconnect or limit the current in case of short circuit, overvoltage and other abnormalities, ensuring that the system operation will not cause flammable gas explosion.
Compliant with explosion-proof certification (if applicable)
Compliant with IECEx, ATEX, NEC or other relevant explosion-proof standards (depending on the actual usage environment and equipment level).
3、 Typical application scenarios
This module is typically used in areas involving hazardous gases in the following TEL equipment or process environments:
Toxic/Combustible Gas Control Unit in CVD (Chemical Vapor Deposition) System
The Etcher system involves interface circuits for gases such as SF ₆, Cl ₂, HBr, etc
Equipment vacuum pump control unit, exhaust treatment system
Gas supply panel (GAS BOX), mass flow control system (MFC) interface
Control nodes with potential explosion risks in special process areas of clean rooms
Product details picture:

049-001007-1
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